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SiOx film

Based on

15 Articles
2 Patents
2017 Most recent source

Composition

1

silicon-rich silicon oxide

silicon oxide SRSO SiOx
Type Single Compound
Formula SiO(x)
Role raw materials

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
relative permittivity

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Applications

Area Application Nanomaterial Variant Source
insulation

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Characterization

Method Nanomaterial Variant Source
atomic force microscopy

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Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • silicon-rich silicon oxide
  1. mVrq29j8mmTV4utn6C0HUORNeo
Product

SiOx film

Thickness: ~ 30 nm

Medium/Support: none

Method 2

Type: Physical formation
Source:
Starting materials
  • silicon-rich silicon oxide
  1. rE0wFTaPuXsbEUEcr2Xn1VP35Y
Product

SiOx film

Thickness: 54 nm

Medium/Support: none

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • poly(dimethylsiloxane)
  1. 6AqHS8
Product

SiOx film

Thickness: 8.8 nm

Wrinkle wavelength: ~ 600 - ~ 1000 nm

Medium: none

Support: poly(dimethylsiloxane)

Method 4

Type: Chemical synthesis
Source:
Starting materials
  • hexamethyldisiloxane
Product

SiOx film

Thickness: 10 nm

Medium/Support: none

References

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