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hole array-perforated silicon membrane/aluminum pad structure

How does this work?

Based on

1 Articles
2017 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

hole array-perforated silicon membrane

Type Nano Material
Formula
Role raw materials
2

aluminium

aluminum
Type Single Compound
Formula Al
Role partial layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
effective thermal conductivity

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Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • Si layer on buried SiO2
  1. 4f0WBuuL9xyLZPsCmD
Product

hole array-perforated silicon membrane/aluminum pad structure

Length: ~ 4200 nm

Thickness: 125 nm

Width: ~ 3600 nm

Medium/Support: none

Method 2

Type: Physical formation
Source:
Starting materials
  • Si layer on buried SiO2
  1. dqC9RoNrTk7SKCUTey
Product

hole array-perforated silicon membrane/aluminum pad structure

Length: ~ 4200 nm

Thickness: 125 nm

Width: ~ 3600 nm

Medium/Support: none

Method 3

Type: Physical formation
Source:
Starting materials
  • Si layer on buried SiO2
  1. UG5CFNGlDMMtSaM0q5
Product

hole array-perforated silicon membrane/aluminum pad structure

Length: ~ 4200 nm

Thickness: 125 nm

Width: ~ 3600 nm

Medium/Support: none

Method 4

Type: Physical formation
Source:
Starting materials
  • Si layer on buried SiO2
  1. F4gjfh2DrTRQ62Djkg
Product

hole array-perforated silicon membrane/aluminum pad structure

Length: ~ 4200 nm

Thickness: 125 nm

Width: ~ 3600 nm

Medium/Support: none

Method 5

Type: Physical formation
Source:
Starting materials
  • Si layer on buried SiO2
  1. h5x5Y9oJVWZEyzuqls
Product

hole array-perforated silicon membrane/aluminum pad structure

Length: ~ 4200 nm

Thickness: 125 nm

Width: ~ 3600 nm

Medium/Support: none

References

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