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example of nano imprint master

Based on

1 Patents
2011 Most recent source

Composition

1

polydimethylsiloxane

PDMS
Type Polymer
Formula
Role layer
2

silicon nitride

Type Single Compound
Formula Si3N4
Role layer
3

silver

Type Single Compound
Formula Ag
Role fillers

Applications

Area Application Nanomaterial Variant Source
tools/devices

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References

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