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SiNx/n+np+-Si/Ti/TiO2/Pt

Based on

1 Articles
2016 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

n-Si

Type Complex Compound
Formula
Role raw materials
2

p+-Si

Type Complex Compound
Formula
Role layer
3

n+-Si

Type Complex Compound
Formula
Role layer
4

silicon-rich silicon nitride

Si-reached silicon nitride silicon nitride a-SiNx SRSN
Type Single Compound
Formula SiN(x)
Role layer

References

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