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TiN/TiO2/Al

Based on

1 Articles
2016 Most recent source

Composition

1

aluminium

aluminum
Type Single Compound
Formula Al
Role layer
2

substoichiometric aluminum oxide

noncrystalline aluminum oxide anodized aluminum oxide aluminium suboxide oxidized aluminium aluminium oxide aluminum oxide alumina
Type Single Compound
Formula AlO(x)
Role layer
3

titanium dioxide (rutile)

rutile
Type Single Compound
Formula TiO2
Role layer
4

TiOx/Ti-oxynitride

Type Complex Compound
Formula
Role layer
5

titanium nitride

Type Single Compound
Formula TiN
Role layer

Applications

Area Application Nanomaterial Variant Source
data storage

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Characterization

Method Nanomaterial Variant Source
X-ray photoelectron spectroscopy

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Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • aluminium
  1. rxMU7HO24tIyrxJzjrz5iLl0Q7XW76N
Product

TiN/TiO2/Al

Thickness: 5 nm

Thickness: 60 nm

Thickness: ~ 50 nm

Medium/Support: none

References

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