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oxidized polydimethylsiloxane horizontal cylinders in spin-on-carbon trenches

Based on

1 Articles
2016 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

spin-on-carbon

SOC
Type Complex Compound
Formula
Role raw materials
2

oxidized polydimethylsiloxane cylinders

oxidized PDMS cylinders
Type Nano Material
Formula
Role layer

Characterization

Method Nanomaterial Variant Source
scanning electron microscopy

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Preparation

Method 1

Type: Chemical synthesis
Source:
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Product

oxidized polydimethylsiloxane horizontal cylinders in spin-on-carbon trenches

Diameter: ~ 26 nm

Height: ~ 42 nm

Medium: none

Support: silicon

References

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