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oxidized polydimethylsiloxane/spin-on-carbon horizontal cylinders in spin-on-carbon trenches

Based on

1 Articles
2016 Most recent source

Composition

1

spin-on-carbon

SOC
Type Complex Compound
Formula
Role raw materials
2

spin-on-carbon

SOC
Type Complex Compound
Formula
Role raw materials
3

oxidized polydimethylsiloxane cylinders

oxidized PDMS cylinders
Type Nano Material
Formula
Role layer

Characterization

Method Nanomaterial Variant Source
scanning electron microscopy

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Preparation

Method 1

Type: Chemical synthesis
Source:
  1. FwqydEa8B5wL2e
Product

oxidized polydimethylsiloxane/spin-on-carbon horizontal cylinders in spin-on-carbon trenches

Size: not specified

Medium: none

Support: silicon

References

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