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Ga2O3/In2O3/Si multilayer film

Based on

1 Articles
2016 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

indium sesquioxide

indium(III) oxide indium trioxide indium oxide
Type Single Compound
Formula In2O3
Role layer
2

gallium(III) oxide

gallium oxide
Type Single Compound
Formula Ga2O3
Role layer

Characterization

Method Nanomaterial Variant Source
mass spectrometry

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Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • quartz
  • indium(III) nitrate
  • ethylene glycol monomethyl ether
  1. rKZWRf7QkrKYGmxjnsZm
  2. rHfSSb2Z
  3. 24nMKdxT29ZTmtJ6
Product

Ga2O3/In2O3/Si multilayer film

Thickness: ~ 40 nm

Medium: none

Support: silicon

References

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