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Al2O3-coated hole-patterned polystyrene layer on silicon

Based on

1 Articles
2014 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon

Type Single Compound
Formula Si
Role raw materials
2

polystyrene

PS
Type Polymer
Formula
Role layer
3

aluminium oxide

aluminum oxide alumina
Type Single Compound
Formula Al2O3
Role layer

Characterization

Method Nanomaterial Variant Source
field emission scanning electron microscopy

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Preparation

Method 1

Type: Physical formation
Source:
Product

Al2O3-coated hole-patterned polystyrene layer on silicon

Hole diameter: ~ 20 nm

Pattern period: 40 nm

Thickness: ~ 7 nm

Medium/Support: none

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • silicon
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Product

Al2O3-coated hole-patterned polystyrene layer on silicon

Pattern period: 40 nm

Thickness: 5 nm

Thickness: ~ 100 nm

Medium/Support: none

References

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