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polymethyl methacrylate/lift-off resist 3D lamellae layers

Based on

1 Articles
2016 Most recent source

Composition

1

PMMA/LOR bilayer

Type Nano Material
Formula
Role layer
2

methyl methacrylate resin

methyl methacrylate resin PMMA
Type Polymer
Formula
Role layer

Characterization

Method Nanomaterial Variant Source
UV

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Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • methyl methacrylate resin
  1. VtW8t6UPbEaFk
Product

polymethyl methacrylate/lift-off resist 3D lamellae layers

Thickness: 80 nm

Medium/Support: none

Method 2

Type: Physical formation
Source:
Starting materials
  • methyl methacrylate resin
  1. Oie0TaFAFfBgx
Product

polymethyl methacrylate/lift-off resist 3D lamellae layers

Thickness: 80 nm

Medium/Support: none

Method 3

Type: Physical formation
Source:
Starting materials
  • methyl methacrylate resin
  1. anBHhL0sIkLt0
Product

polymethyl methacrylate/lift-off resist 3D lamellae layers

Thickness: 80 nm

Medium/Support: none

Method 4

Type: Physical formation
Source:
Starting materials
  • methyl methacrylate resin
  1. sKy9esJ7usOqW
Product

polymethyl methacrylate/lift-off resist 3D lamellae layers

Thickness: 80 nm

Medium/Support: none

References

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