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silicon nitride film

Based on

1 Articles
2016 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

grated silicon nitride film

silicon nitride film
Type Nano Material
Formula
Role raw materials

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  1. IfnPdKMJFAfjW9l8x8scjOS9lQBaADU6LZC76Nv3
Product

silicon nitride film

Hole depth: 20 nm

Hole diameter: 90 nm

Medium: none

Support: silicon-on-insulator

Method 2

Type: Physical formation
Source:
Starting materials
  1. EDMH1p0KRqlQAJr6w0M7kiPTBWtnXH4Vx4cAkdh5
Product

silicon nitride film

Hole depth: 20 nm

Hole diameter: 40 nm

Medium: none

Support: silicon-on-insulator

Method 3

Type: Physical formation
Source:
Starting materials
  1. XrC3ScocLkRbd8qIgCm2i3qecBj2BTPyP1KwCzX6
Product

silicon nitride film

Hole depth: 20 nm

Medium: none

Support: silicon-on-insulator

Method 4

Type: Physical formation
Source:
Starting materials
  1. eQNi6cJeZiWra6gvXaoUqg6SsE5skXtku1KHUydz
Product

silicon nitride film

Hole depth: 20 nm

Hole diameter: 40 nm

Medium: none

Support: silicon-on-insulator

References

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