Loading ...

square hole-patterned silicon film

Based on

13 Articles
2017 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

doped silicon

doped Si
Type Complex Compound
Formula
Role raw materials

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
electrical resistivity

More information/entries available to subscribers only.

Or, view sample content

Characterization

Method Nanomaterial Variant Source
scanning electron microscopy

More information available to subscribers only.

Or, view sample content

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • Si/SiO2
Product

square hole-patterned silicon film

Distance between holes: 30 - 50 nm

Longitudinal pitch: 80 - 120 nm

Roughness: < 10 nm

Thickness: 60 - 100 nm

Transverse pitch: 90 - 110 nm

Medium/Support: none

Method 2

Type: Physical formation
Source:
Starting materials
  • Si/SiO2
Product

square hole-patterned silicon film

Distance between holes: 30 - 50 nm

Longitudinal pitch: 200 nm

Roughness: < 10 nm

Thickness: 60 - 100 nm

Transverse pitch: 90 - 110 nm

Medium/Support: none

Method 3

Type: Physical formation
Source:
Starting materials
  • Si/SiO2
Product

square hole-patterned silicon film

Distance between holes: 30 - 50 nm

Longitudinal pitch: 100 nm

Roughness: < 10 nm

Thickness: 60 - 100 nm

Transverse pitch: 90 - 110 nm

Medium/Support: none

Method 4

Type: Physical formation
Source:
Starting materials
  • Si/SiO2
Product

square hole-patterned silicon film

Distance between holes: 30 - 50 nm

Longitudinal pitch: 1000 nm

Roughness: < 10 nm

Thickness: 60 - 100 nm

Transverse pitch: 90 - 110 nm

Medium/Support: none

Method 5

Type: Chemical synthesis
Source:
Starting materials
  1. k0nphqpmitTTW3J04
Product

square hole-patterned silicon film

Thickness: 97 - 103 nm

Medium/Support: none

References

Full content is available to subscribers only

To view content please choose from the following:


Sign up for a free trial