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CoFeB/AlOx/CoFeB piezoelectric structure

Based on

1 Articles
2014 Most recent source

Composition

1

tantalum

Type Single Compound
Formula Ta
Role layer
2

ruthenium

Type Single Compound
Formula Ru
Role layer
3

tantalum

Type Single Compound
Formula Ta
Role layer
4

cobalt iron boron

cobalt-iron-boron
Type Single Compound
Formula CoFeB
Role layer
5

substoichiometric aluminum oxide

noncrystalline aluminum oxide anodized aluminum oxide aluminium suboxide oxidized aluminium aluminium oxide aluminum oxide alumina
Type Single Compound
Formula AlO(x)
Role layer
6

cobalt iron boron

cobalt-iron-boron
Type Single Compound
Formula CoFeB
Role layer
7

IrMn alloy

Type Complex Compound
Formula
Role layer
8

tantalum

Type Single Compound
Formula Ta
Role layer
9

ruthenium

Type Single Compound
Formula Ru
Role layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
magnetization

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Applications

Area Application Nanomaterial Variant Source
electronics

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Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • tantalum
  1. ZavcG6AH576vaSnZNYZExvgoKeJeIRRUUHvtljQu1fgzziPSkB7Ql8aqq7hOvCZwyFq4CN7KX6x664PNoxNAwvIYa
  2. rI1lPj
Product

CoFeB/AlOx/CoFeB piezoelectric structure

Thickness: 12 nm

Thickness: 2 nm

Thickness: 20 nm

Thickness: 4 nm

Thickness: 5 nm

Medium/Support: none

References

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