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silicon/buried oxide/nanopatterned polystyrene

Based on

1 Articles
2014 Most recent source

Composition

1

silicon-rich silicon oxide

SRSO SiOx
Type Single Compound
Formula SiO(x)
Role layer
2

silicon

Type Single Compound
Formula Si
Role layer
3

boron

Type Single Compound
Formula B
Role dopant
4

PS

Type Polymer
Formula
Role layer

Characterization

Method Nanomaterial Variant Source
scanning electron microscopy

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Preparation

Method 1

Type: Physical formation
Source:
  1. JCWMu1EUwIcm5IxPBoGa
Product

silicon/buried oxide/nanopatterned polystyrene

Distance between holes: ~ 15 nm

Hole diameter: ~ 65 nm

Thickness: 200 nm

Thickness: 22 - 28 nm

Thickness: ~ 90 nm

Medium/Support: none

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • silicon-rich silicon oxide
Product

silicon/buried oxide/nanopatterned polystyrene

Distance between holes: ~ 40 nm

Hole diameter: ~ 40 nm

Thickness: 110 nm

Thickness: 200 nm

Thickness: 22 - 28 nm

Medium/Support: none

References

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