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Si3N4/SiO2/Pt/Ti/quartz

Based on

1 Articles
2014 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

titanium

Type Single Compound
Formula Ti
Role partial layer
2

platinum

Type Single Compound
Formula Pt
Role layer
3

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role layer
4

silicon nitride

Type Single Compound
Formula Si3N4
Role layer

References

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