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OTS monolayer/SiNx/Si

Based on

1 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon

Type Single Compound
Formula Si
Role carriers
2

silicon-rich silicon nitride

Si-reached silicon nitride silicon nitride a-SiNx SRSN
Type Single Compound
Formula SiN(x)
Role layer
3

trichloro(octadecyl)-silane

n-octadecyltrichlorosilane trichloro(octadecyl)silane octadecayltrichlorosilane octadecyl trichlorosilane octadecyltrichlorosilane trichlorooctadecylsilane octadecyltrchlorosilane C18-OTS ODTS OTCS OTS
Type Single Compound
Formula C18H37SiCl3
Role layer

Applications

Area Application Nanomaterial Variant Source
raw materials/precursors/templates

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Characterization

Method Nanomaterial Variant Source
mass spectrometry

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Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
Product

OTS monolayer/SiNx/Si

Hole diameter: 160 nm

Pitch: 438 nm

Thickness: 50 nm

Medium/Support: none

References

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