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plasma damaged SiCOH film

Based on

1 Articles
2011 Most recent source

Composition

1

organosilicate glass

Type Complex Compound
Formula
Role layer
2

diamond-like C:H network

hydrocarbon moiety hydrocarbon CxHy CHx
Type Single Compound
Formula CH(x)
Role dopant
3

organosilicate glass

Type Complex Compound
Formula
Role layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
water absorption dependent on RF power

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Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  1. HkQBVIL2C2JvAkjbzUIvU
  2. zyaU3
  3. dqp7Hk
Product

plasma damaged SiCOH film

Pore diameter: 1.6 - 3.2 nm

Thickness: 200 nm

Thickness: 49 - 78 nm

Medium/Support: none

References

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