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Si-based columnar templates

Based on

1 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon

Type Single Compound
Formula Si
Role raw materials
2

hydrogen silsesquioxane monomer

hydrogen silsesquioxane octasilsesquioxane XR-1541-002 Fox-16 HSQ
Type Single Compound
Formula H8Si8O12
Role layer

Characterization

Method Nanomaterial Variant Source
scanning electron microscopy

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Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • Si/Si3N4 double side polished wafer
  1. rxVDwlE57v3aRom4sozU
Product

Si-based columnar templates

Diameter: 30 nm

Diameter: 40 nm

Height: 931 nm

Thickness: ~ 140 nm

Medium: none

Support: Si/Si3N4 double side polished wafer

Method 2

Type: Physical formation
Source:
Starting materials
  • Si/Si3N4 double side polished wafer
  1. AJN6PahS2QLAG5V1Npgv
Product

Si-based columnar templates

Diameter: 20 - 90 nm

Height: 930 nm

Thickness: ~ 140 nm

Medium: none

Support: Si/Si3N4 double side polished wafer

References

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