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after CCVD TaNx thin film

Based on

1 Articles
2011 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

nanofilm

Type Nano Material
Formula
Role layer
2

carbon nanotubes

Type Nano Material
Formula
Role layer

Characterization

Method Nanomaterial Variant Source
scanning electron microscopy

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Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • ferrocene
  • mixture of substance based on (tantalum(III) nitride/tantalum(III) nitride/atomic nitrogen/atomic nitrogen/atomic oxygen/atomic oxygen/β-tantalum/β-tantalum)
  1. DfVY1dWp2FkAXfQ9B6hKcRUAHnVofbxcFck4YUq
  2. ldp6ECR
  3. Pfepm6KysHVnTKMfetA7
Product

after CCVD TaNx thin film

Size: not specified

Medium/Support: none

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • ferrocene
  • mixture of substance based on (tantalum(III) nitride/tantalum(III) nitride/tantalum nitride/tantalum nitride)
  1. tdOyGE7k4qSWQCrO4GBmNQLYYz4A0Jn4tsrV5Yb
  2. xklQ8c2
  3. gDQqz73ssv9at9tk4vyR
Product

after CCVD TaNx thin film

Size: not specified

Medium/Support: none

References

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