Loading ...

Al2O3 thin film

Based on

159 Articles
9 Patents
2018 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

aluminium oxide

aluminum oxide alumina
Type Single Compound
Formula Al2O3
Role raw materials

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
density

More information/entries available to subscribers only.

Or, view sample content

refractive index
relative permittivity

Catalytic properties

Reaction Value Nanomaterial Variant Source
ethylene dehydrogenation

More information available to subscribers only.

Or, view sample content

Applications

Area Application Nanomaterial Variant Source
coatings

More information/entries available to subscribers only.

Or, view sample content

electronics

Characterization

Method Nanomaterial Variant Source
atomic force microscopy

More information/entries available to subscribers only.

Or, view sample content

ellipsometry
scanning electron microscopy
spectroscopic ellipsometry
transmission electron microscopy
UV
UV-Vis spectroscopy
X-ray diffraction
X-ray photoelectron spectroscopy
X-ray reflectometry

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • aluminium tri(iso-propoxide)
  1. UsnMEFrc3CflFubB1DojuH09TTJpTNFNaKNJV
  2. 84FEpZt
Product

Al2O3 thin film

Thickness: ~ 60 nm

Medium/Support: none

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • aluminium
  • oxygen
  1. OtEd2D
  2. fAu65pKS1BxRE93Qn2Hx
Product

Al2O3 thin film

Thickness: 12 nm

Medium/Support: none

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • trimethylaluminium
  • water
Product

Al2O3 thin film

Thickness: 21.5 nm

Medium/Support: none

Method 4

Type: Chemical synthesis
Source:
Starting materials
  • trimethylaluminium
  1. N8iidv
Product

Al2O3 thin film

Thickness: 100 nm

Medium/Support: none

Method 5

Type: Chemical synthesis
Source:
Starting materials
  • trimethylaluminium
  1. iVYNIH
Product

Al2O3 thin film

Thickness: 45 nm

Medium/Support: none

References

Full content is available to subscribers only

To view content please choose from the following:


Sign up for a free trial