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Al2O3 thin film

Based on

160 Articles
9 Patents
2018 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

aluminium oxide

aluminum oxide alumina
Type Single Compound
Formula Al2O3
Role raw materials

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
density

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refractive index
relative permittivity

Catalytic properties

Reaction Value Nanomaterial Variant Source
ethylene dehydrogenation

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Applications

Area Application Nanomaterial Variant Source
coatings

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electronics

Characterization

Method Nanomaterial Variant Source
atomic force microscopy

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ellipsometry
scanning electron microscopy
spectroscopic ellipsometry
transmission electron microscopy
UV
UV-Vis spectroscopy
X-ray diffraction
X-ray photoelectron spectroscopy
X-ray reflectometry

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • trimethylaluminium
  • water
Product

Al2O3 thin film

Thickness: 21.5 nm

Medium/Support: none

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • aluminium
  • oxygen
  1. ltvBqt
  2. j0WwMsbuLjU4DGQR2HED
Product

Al2O3 thin film

Thickness: 12 nm

Medium/Support: none

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • aluminium tri(iso-propoxide)
  1. 1BOzQatfYvS46bDclmS0SiV1c51t89cnfaEi1
  2. 58o3nvR
Product

Al2O3 thin film

Thickness: ~ 60 nm

Medium/Support: none

Method 4

Type: Chemical synthesis
Source:
Starting materials
  • trimethylaluminium
  • p-type Si
  1. Q8see
Product

Al2O3 thin film

Thickness: ~ 31 nm

Medium: none

Support: p-type Si

Method 5

Type: Chemical synthesis
Source:
Starting materials
  • trimethylaluminium
  • p-type Si
  1. puaRv
Product

Al2O3 thin film

Thickness: 10.7 nm

Medium: none

Support: p-type Si

References

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