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annealed TaNx thin film

Based on

1 Articles
2011 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

mixture of substance based on (tantalum pentoxide/tantalum pentoxide/tantalum nitride/tantalum nitride)

Type Complex Compound
Formula
Role raw materials

Characterization

Method Nanomaterial Variant Source
X-ray diffraction

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Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  1. 2Ld07mLv1e
Product

annealed TaNx thin film

Thickness: 40 - 140 nm

Medium/Support: none

Method 2

Type: Chemical synthesis
Source:
Starting materials
  1. sXgibidS0u
Product

annealed TaNx thin film

Thickness: 40 - 140 nm

Medium/Support: none

References

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