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silicon nitride/gold bilayer

Based on

3 Articles
2016 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon nitride

Type Single Compound
Formula Si3N4
Role layer
2

gold

Type Single Compound
Formula Au
Role layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
capacitance

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Characterization

Method Nanomaterial Variant Source
atomic force microscopy

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Preparation

Method 1

Type: Physical formation
Source:
  1. 20cIOMR
Product

silicon nitride/gold bilayer

Hole wall thickness: ~ 700 nm

Length: 60000 nm

Pattern cell length: 7000 nm

Pattern cell width: 5000 nm

Thickness: 50 nm

Thickness: 60 nm

Width: 60000 nm

Medium/Support: none

Method 2

Type: Physical formation
Source:
Starting materials
Product

silicon nitride/gold bilayer

Thickness: 50 nm

Thickness: 60 nm

Medium/Support: none

Method 3

Type: Physical formation
Source:
  1. HI5jQWT
Product

silicon nitride/gold bilayer

Hole wall thickness: ~ 1400 nm

Length: 60000 nm

Pattern cell length: 7000 nm

Pattern cell width: 5000 nm

Thickness: 50 nm

Thickness: 60 nm

Width: 60000 nm

Medium/Support: none

Method 4

Type: Physical formation
Source:
  1. lTMX3DC
Product

silicon nitride/gold bilayer

Length: 20000 nm

Pattern cell length: 900 nm

Pattern cell width: 600 nm

Thickness: 50 nm

Thickness: 60 nm

Width: 20000 nm

Medium/Support: none

Method 5

Type: Physical formation
Source:
  1. hkzDf4D
Product

silicon nitride/gold bilayer

Length: 20000 nm

Pattern cell length: 1800 nm

Pattern cell width: 1200 nm

Thickness: 50 nm

Thickness: 60 nm

Width: 20000 nm

Medium/Support: none

References

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