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TiN thin film

Based on

27 Articles
2 Patents
2017 Most recent source

Composition

1

titanium nitride

Type Single Compound
Formula TiN
Role raw materials

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
activation energy

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Applications

Area Application Nanomaterial Variant Source
analysis methods

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Characterization

Method Nanomaterial Variant Source
X-ray diffraction

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Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • Si wafer
  • titanium nitride
Product

TiN thin film

Thickness: 50 nm

Medium: none

Support: Si wafer

Method 2

Type: Physical formation
Source:
Starting materials
Product

TiN thin film

Groove square edge: 1000 nm

Groove width: 250 nm

Thickness: 50 nm

Medium: none

Support: silicon nitride

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • titanium
  • silicon nitride
  • nitrogen
  1. 9ozNU
  2. 87VzU
Product

TiN thin film

Thickness: 50 nm

Medium: none

Support: silicon nitride

Method 4

Type: Physical formation
Source:
Starting materials
Product

TiN thin film

Groove square edge: 1000 nm

Groove width: 300 nm

Thickness: 50 nm

Medium: none

Support: silicon nitride

Method 5

Type: Physical formation
Source:
Starting materials
Product

TiN thin film

Groove square edge: 1000 nm

Groove width: 350 nm

Thickness: 50 nm

Medium: none

Support: silicon nitride

References

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