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SU-8 micropatterns with cracking-assisted nanopatterns

Based on

1 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

SU-8

Type Polymer
Formula
Role raw materials

Applications

Area Application Nanomaterial Variant Source
raw materials/precursors/templates

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Characterization

Method Nanomaterial Variant Source
atomic force microscopy

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Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • SU-8
Product

SU-8 micropatterns with cracking-assisted nanopatterns

Nanochannel depth: ~ 20 - ~ 35 nm

Nanochannel width: ~ 400 - ~ 700 nm

Thickness: ~ 11500 nm

Medium: none

Support: silicon

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • SU-8
Product

SU-8 micropatterns with cracking-assisted nanopatterns

Pattern periodicity: ~ 110000 nm

Thickness: ~ 10000 nm

Medium: none

Support: silicon

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • SU-8
Product

SU-8 micropatterns with cracking-assisted nanopatterns

Nanochannel depth: ~ 143 nm

Nanochannel length: ~ 200000 nm

Nanochannel width: ~ 1400 nm

Thickness: ~ 10000 nm

Medium: none

Support: silicon

Method 4

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • SU-8
Product

SU-8 micropatterns with cracking-assisted nanopatterns

Nanochannel depth: 170 nm

Nanochannel length: 6000000 nm

Nanochannel width: 2000 nm

Thickness: ~ 10000 nm

Medium: none

Support: silicon

Method 5

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • SU-8
Product

SU-8 micropatterns with cracking-assisted nanopatterns

Thickness: ~ 10000 nm

Medium: none

Support: silicon

References

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