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PMMA-coated silicon nitride nanocantilevers

Based on

1 Articles
2014 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon nitride nanocantilevers

Type Nano Material
Formula
Role core
2

poly(methyl methacrylate)

methyl methacrylate resin PMMA
Type Polymer
Formula
Role layer

Properties

Sensor properties

Type of sensor Sensor property Nanomaterial Variant Source
compounds sensor for ethyl acetate

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Applications

Area Application Nanomaterial Variant Source
sensors (excluding biosensors)

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Characterization

Method Nanomaterial Variant Source
scanning electron microscopy

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Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • methyl methacrylate
  1. YYohUUS4
  2. Sop1g
  3. lNqO3fKj2C
  4. c7PRgewIO6nmhZ94Pee
Product

PMMA-coated silicon nitride nanocantilevers

Thickness: ~ 58 nm

Medium/Support: none

Method 2

Type: Physical formation
Source:
Starting materials
  • methyl methacrylate
  1. 9Ycdy1kd
  2. t04Aq
  3. L3Z5w48ljT
  4. VHYZzf2iw5QruvRXZBN
Product

PMMA-coated silicon nitride nanocantilevers

Thickness: ~ 70 nm

Medium/Support: none

Method 3

Type: Physical formation
Source:
Starting materials
  • methyl methacrylate
  1. y5QdcLmO
  2. gDyuT
  3. dc1aNHBmDf
  4. 9ATvt1L6UX40yBZfyoC
Product

PMMA-coated silicon nitride nanocantilevers

Thickness: ~ 20 nm

Medium/Support: none

Method 4

Type: Physical formation
Source:
Starting materials
  • methyl methacrylate
  1. MqsEQLYM
  2. W8b72
  3. bGjhSqxtyZ
  4. WcRuMC89DuZWIqyfkC5
Product

PMMA-coated silicon nitride nanocantilevers

Thickness: ~ 105 nm

Medium/Support: none

Method 5

Type: Physical formation
Source:
Starting materials
  • methyl methacrylate
  1. G3ZhHxjP
  2. mdLz0
  3. qF66SKpmHN
  4. UW2nSokwFbttfuwnAgu
Product

PMMA-coated silicon nitride nanocantilevers

Thickness: ~ 10 nm

Medium/Support: none

References

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