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BCB-coated SiO2/Si substrate

Based on

1 Articles
2014 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon

Type Single Compound
Formula Si
Role layer
2

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role layer
3

cross-linked divinyltetramethyldisiloxane bis(benzocyclobutene)

cross-linked BCB
Type Polymer
Formula
Role layer

References

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