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nanohole array-patterned Si3N4

Based on

7 Articles
2018 Most recent source

Composition

1

silicon nitride

Type Single Compound
Formula Si3N4
Role raw materials

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
angle-resolved transmission spectroscopy

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Applications

Area Application Nanomaterial Variant Source
analysis methods

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Characterization

Method Nanomaterial Variant Source
atomic force microscopy

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Biological effects

Biological system Test details Nanomaterial Variant Source
bovine serum albumin

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Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • silicon nitride/silicon dioxide/silicon/silicon nitride
  1. a7kAeikDp7A79wxmmCQQ7e9XHPuckVpwqYMMD2u6o63rrpV1pDmJ9uD1ELhjpZQC3fLtz
  2. afbVmYok
  3. xEgURA85I7Gx84HR1wrQdHxc8
Product

nanohole array-patterned Si3N4

Period size: 385-505 nm

Medium: none

Support: silicon nitride/silicon dioxide/silicon/silicon nitride

Method 2

Type: Physical formation
Source:
Starting materials
  1. gOeOPhq
Product

nanohole array-patterned Si3N4

Diameter: 200 nm

Length: 5000-6000 nm

Narrowest part of tip: 30 nm

Medium/Support: none

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • Si3N4/Si
Product

nanohole array-patterned Si3N4

Hole depth: 300 nm

Hole diameter: ~ 265 nm

Hole periodicity: 530 nm

Maximum valley depth: 5.467 - 13.459 nm

Nonpatterned side RMS roughness: 0.401 - 0.466 nm

Nonpatterned side roughness: 0.3140 - 0.353 nm

Thickness: 800 nm

Medium: none

Support: soda-lime-silica glass

Method 4

Type: Chemical synthesis
Source:
Starting materials
  • Si3N4/Si
Product

nanohole array-patterned Si3N4

Hole depth: 300 nm

Hole diameter: ~ 265 nm

Hole periodicity: 530 nm

Thickness: 450 nm

Medium: none

Support: soda-lime-silica glass

Method 5

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • nitrogen
  1. MfbcosQ
  2. Lg48M
Product

nanohole array-patterned Si3N4

Thickness: ~ 2 nm

Medium: none

Support: silicon

References

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