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germanium/HSQ prepattern

Based on

1 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

germanium

Type Single Compound
Formula Ge
Role layer
2

hydrogen silsesquioxane monomer

hydrogen silsesquioxane octasilsesquioxane XR-1541-002 XR-1541-4 XR-1541 Fox-16 FOx-16 HSQ
Type Single Compound
Formula H8O12Si8
Role layer
3

hydrogen silsesquioxane monomer

hydrogen silsesquioxane octasilsesquioxane XR-1541-002 XR-1541-4 XR-1541 Fox-16 FOx-16 HSQ
Type Single Compound
Formula H8O12Si8
Role partial layer

Preparation

Method 1

Type: Physical formation
Source:
  1. HFQ7gCb
  2. KVh52gqLTorHwBE
Product

germanium/HSQ prepattern

Channel width: 326 nm

Line width: 50 nm

Thickness: ~ 60 nm

Medium: none

Support: SiO2/Si

Method 2

Type: Physical formation
Source:
  1. 7AYS0B4
  2. EcqTgcDBybAd7tK
Product

germanium/HSQ prepattern

Line width: 50 nm

Thickness: ~ 60 nm

Medium: none

Support: SiO2/Si

Method 3

Type: Physical formation
Source:
  1. pPTd0TY
  2. t2lrhPDTZNhyOt7
Product

germanium/HSQ prepattern

Channel width: 224 nm

Line width: 50 nm

Thickness: ~ 60 nm

Medium: none

Support: SiO2/Si

Method 4

Type: Physical formation
Source:
  1. RYMNaBx
  2. luNanQ9ZECq5HqG
Product

germanium/HSQ prepattern

Channel width: 361 nm

Line width: 50 nm

Thickness: ~ 60 nm

Medium: none

Support: SiO2/Si

Method 5

Type: Physical formation
Source:
  1. nZNbQff
  2. Q1YhHR4y8xf0Rs5
Product

germanium/HSQ prepattern

Channel width: 265 nm

Line width: 50 nm

Thickness: ~ 60 nm

Medium: none

Support: SiO2/Si

References

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