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nanoporous silicon nitride-covered silicon wafer

Based on

1 Articles
2014 Most recent source

Composition

1

silicon-rich nitride

silicon mononitride silicon nitride
Type Single Compound
Formula SiN
Role layer
2

silicon

Type Single Compound
Formula Si
Role layer
3

nanoporous silicon nitride membrane

nanoporous silicon nitride
Type Nano Material
Formula
Role layer
4

porous nanocrystalline silicon

pnc-Si
Type Nano Material
Formula
Role layer
5

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role layer

Preparation

Method 1

Type: Chemical synthesis
Source:
  1. VmthNOb4EMO4Zgx
  2. 1yvZQZ0vMWWLV
  3. pJHeXLMsONNzH
  4. pG
  5. HnSe1jGPX
  6. iIVt
Product

nanoporous silicon nitride-covered silicon wafer

Thickness: 100 nm

Thickness: 50 nm

Medium/Support: none

Method 2

Type: Chemical synthesis
Source:
  1. 4gyNj9us4FYdnjd
  2. lbehDfBQFTikg
  3. gQESfkzVLcJf8
  4. zT
  5. rdLLXeynR
  6. Hq6h
Product

nanoporous silicon nitride-covered silicon wafer

Thickness: 100 nm

Thickness: 50 nm

Medium/Support: none

References

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