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Si/SiO2/SiNx

Based on

1 Articles
2014 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon

Type Single Compound
Formula Si
Role layer
2

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role layer
3

Si-rich silicon nitride

silicon-rich nitride silicon nitride Si-rich nitride a-SiNx SRN
Type Single Compound
Formula SiN(x)
Role layer

References

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