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SU-8 thin film

Based on

4 Articles
2017 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

epoxy-based polymer SU-8

SU-8
Type Polymer
Formula
Role raw materials

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
bending stiffness

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Characterization

Method Nanomaterial Variant Source
infrared reflection-absorption spectroscopy

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Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • SU-8
  1. Bpn2Prj53UBfQPAWrk3bTRuI
  2. 20VBKkJEjxm9dc
Product

SU-8 thin film

Thickness: ~ 40 nm

Medium/Support: none

Method 2

Type: Physical formation
Source:
Starting materials
  • SU-8
  1. jt22jjrZGhPU0pWjCPHwkpNm
  2. 6wCz1g03b9MTq7
Product

SU-8 thin film

Thickness: ~ 70 nm

Medium/Support: none

Method 3

Type: Physical formation
Source:
Starting materials
  • SU-8
  1. TMKyOKprmDTtY5jKr9tNqGUD
  2. esCC476LK5DPGI
Product

SU-8 thin film

Thickness: ~ 100 nm

Medium/Support: none

Method 4

Type: Physical formation
Source:
Starting materials
  • soda-lime-silica glass
  • epoxy-based polymer SU-8
  1. 7dUOwaoC4jfUluLmiRqRjVUgQ
Product

SU-8 thin film

Size: not specified

Medium: none

Support: soda-lime-silica glass

References

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