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nanohole array-patterned HSQ/Au film

Based on

1 Articles
2014 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

chromium

Type Single Compound
Formula Cr
Role layer
2

hydrogen silsesquioxane

XR-1541 HSQ
Type Polymer
Formula
Role layer
3

chromium

Type Single Compound
Formula Cr
Role layer
4

gold

Type Single Compound
Formula Au
Role layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
analytical enhancement factor of r6g detection

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Applications

Area Application Nanomaterial Variant Source
analysis methods

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Characterization

Method Nanomaterial Variant Source
scanning electron microscopy

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Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • chromium
Product

nanohole array-patterned HSQ/Au film

Hole diameter: 370 nm

Pattern periodicity: 500 nm

Thickness: 20 nm

Thickness: 3 nm

Thickness: ~ 57 nm

Medium: none

Support: silicon

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • chromium
Product

nanohole array-patterned HSQ/Au film

Hole diameter: 645 nm

Pattern periodicity: 780 nm

Thickness: 20 nm

Thickness: 3 nm

Thickness: 55 nm

Medium: none

Support: silicon

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • chromium
Product

nanohole array-patterned HSQ/Au film

Hole diameter: 645 nm

Pattern periodicity: 780 nm

Thickness: 20 nm

Thickness: 200 nm

Thickness: 3 nm

Medium: none

Support: silicon

Method 4

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • chromium
Product

nanohole array-patterned HSQ/Au film

Hole diameter: 370 nm

Pattern periodicity: 500 nm

Thickness: 20 nm

Thickness: 3 nm

Thickness: ~ 48 nm

Medium: none

Support: silicon

Method 5

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • chromium
Product

nanohole array-patterned HSQ/Au film

Hole diameter: 370 nm

Pattern periodicity: 500 nm

Thickness: 20 nm

Thickness: 3 nm

Thickness: 55 nm

Medium: none

Support: silicon

References

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