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HSQ resist array

Based on

1 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

HSQ resist

Type Polymer
Formula
Role raw materials

Characterization

Method Nanomaterial Variant Source
scanning electron microscopy

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Preparation

Method 1

Type: Physical formation
Source:
Starting materials
Product

HSQ resist array

Height: 50 nm

Width: 50 nm

Medium: none

Support: p-type silicon with native oxide layer

Method 2

Type: Physical formation
Source:
Starting materials
Product

HSQ resist array

Channel width: 160 nm

Height: 50 nm

Width: 50 nm

Medium: none

Support: p-type silicon with native oxide layer

Method 3

Type: Physical formation
Source:
Starting materials
Product

HSQ resist array

Channel width: 128 nm

Height: 50 nm

Width: 50 nm

Medium: none

Support: p-type silicon with native oxide layer

Method 4

Type: Physical formation
Source:
Starting materials
Product

HSQ resist array

Channel width: 64 nm

Height: 50 nm

Width: 50 nm

Medium: none

Support: p-type silicon with native oxide layer

References

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