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Al/W/Ti film

Based on

2 Articles
2017 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

titanium

Type Single Compound
Formula Ti
Role layer
2

tungsten

Type Single Compound
Formula W
Role layer
3

aluminium

aluminum
Type Single Compound
Formula Al
Role layer

Applications

Area Application Nanomaterial Variant Source
raw materials/precursors/templates

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Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • SiO2/Si
  • titanium
Product

Al/W/Ti film

Thickness: 200 nm

Thickness: 5 nm

Thickness: 50 nm

Medium: none

Support: SiO2/Si

Method 2

Type: Physical formation
Source:
Starting materials
  • SiO2/Si
  • titanium
Product

Al/W/Ti film

Thickness: 200 nm

Thickness: 50 nm

Thickness: 700 nm

Medium: none

Support: SiO2/Si

Method 3

Type: Physical formation
Source:
Starting materials
  • SiO2/Si
  • titanium
Product

Al/W/Ti film

Thickness: 10 nm

Thickness: 200 nm

Thickness: 700 nm

Medium: none

Support: SiO2/Si

Method 4

Type: Physical formation
Source:
Product

Al/W/Ti film

Thickness: 10 nm

Thickness: <= 8 nm

Thickness: ~ 200 nm

Medium: none

Support: silicon/silica

References

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