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PMMA/LOR resist/Ti/SiO2/silicon patterned with straight trench

Based on

1 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role layer
2

titanium

Type Single Compound
Formula Ti
Role partial layer
3

LOR resist

Type Complex Compound
Formula
Role layer
4

methyl methacrylate resin

methyl methacrylate resin PMMA
Type Polymer
Formula
Role layer

References

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