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Si/silicon-rich SiNx/GST/SiO2/SiNx

Based on

1 Articles
2013 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon-rich SiNx

Type Complex Compound
Formula
Role layer
2

germanium antimony telluride

Ge-Sb-Te ternary alloy Ge2Sb2Te5 GST
Type Single Compound
Formula Ge2Sb2Te5
Role layer
3

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role partial layer
4

silicon-rich silicon nitride

Si-reached silicon nitride silicon nitride a-SiNx SRSN
Type Single Compound
Formula SiN(x)
Role layer

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  1. 8xtuq4
Product

Si/silicon-rich SiNx/GST/SiO2/SiNx

Thickness: 100 nm

Thickness: 200 nm

Thickness: 300 nm

Medium: none

Support: silicon

References

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