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Si/NiSi bilayer film

Based on

1 Articles
2014 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

amorphous silicon

amorphous Si a-Si:H a-Si aSi
Type Single Compound
Formula Si
Role layer
2

nickel disilicide/amorphous silicon blend

Type Complex Compound
Formula
Role layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
reflectivity

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Characterization

Method Nanomaterial Variant Source
selected area electron diffraction

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Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • silicon
Product

Si/NiSi bilayer film

Crystallite size: ~ 5 - 10 nm

Thickness: 16 nm

Thickness: 3 nm

Medium/Support: none

Method 2

Type: Physical formation
Source:
Starting materials
  1. qiRVS3
Product

Si/NiSi bilayer film

Thickness: 16 nm

Thickness: 3 nm

Medium/Support: none

Method 3

Type: Physical formation
Source:
Starting materials
  1. 6weWqJ
Product

Si/NiSi bilayer film

Grain size: 10 - 20 nm

Thickness: 16 nm

Thickness: 3 nm

Medium/Support: none

References

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