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patterned AlN membrane on Si/Si3N4

Based on

1 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

aluminium nitride

aluminum nitride
Type Single Compound
Formula AlN
Role layer
2

silicon nitride

Type Single Compound
Formula Si3N4
Role layer
3

silicon

Type Single Compound
Formula Si
Role layer

Applications

Area Application Nanomaterial Variant Source
sensors (excluding biosensors)

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Characterization

Method Nanomaterial Variant Source
scanning electron microscopy

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Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
Product

patterned AlN membrane on Si/Si3N4

Thickness: 100 nm

Medium/Support: none

Method 2

Type: Chemical synthesis
Source:
Starting materials
Product

patterned AlN membrane on Si/Si3N4

Thickness: 40 nm

Medium/Support: none

References

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