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tungsten thin film

Based on

1 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

SiO2/SiNx

Type Complex Compound
Formula
Role layer
2

tungsten

β-W
Type Single Compound
Formula W
Role layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
electrical resistivity dependent on synthesis parameter

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Characterization

Method Nanomaterial Variant Source
X-ray diffraction

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Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  1. LGfVNO2WOqLTdFkfz
  2. q5EkWQ
  3. 7eCwDLd
  4. e65npBqkdSvKmfQeqHkZogko
Product

tungsten thin film

Crystallite size: 40 - 70 nm

RMS roughness: 0.60 nm

Thickness: 50 nm

Medium: none

Support: silicon

Method 2

Type: Physical formation
Source:
Starting materials
  1. P0b5k4p2gNLl8AIxq
  2. WbGLL7
  3. af5zfqAf
  4. ES68X9JMF8kKBwXRNXDrxXLoj
Product

tungsten thin film

Crystallite size: 5 - 12 nm

RMS roughness: 0.81 nm

Thickness: 40 nm

Thickness: 50 nm

Medium: none

Support: silicon

References

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