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tungsten thin film

How does this work?

Based on

1 Articles
2015 Most recent source

Composition

1

SiO2/SiNx

Type Complex Compound
Formula
Role layer
2

tungsten

α-W
Type Single Compound
Formula W
Role layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
electrical resistivity

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Characterization

Method Nanomaterial Variant Source
scanning electron microscopy

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Preparation

Method 1

Type: Physical formation
Source:
Starting materials
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  2. k58hoH
  3. pauR8Q9
  4. y1fl9m15IprzfspkgQIQ18p0Q
Product

tungsten thin film

Crystallite size: 40 - 70 nm

RMS roughness: 1.63 nm

Thickness: 230 nm

Thickness: 50 nm

Medium: none

Support: silicon

Method 2

Type: Physical formation
Source:
Starting materials
  1. QIqg42CqedGGEeyVZw
  2. V3DgK8jtDXlyhL0qoQh1
  3. hP4qlr
  4. bWwq19K
  5. vSz7I3vqJrKfzUcq1We39kuUU
Product

tungsten thin film

Cavity diameter: ~ 35 nm

Crystallite size: 12 - 40 nm

RMS roughness: 12.21 nm

Thickness: 250 nm

Thickness: 50 nm

Medium: none

Support: silicon

Method 3

Type: Physical formation
Source:
Starting materials
  1. xppdzb734Z468s80HL
  2. 63zsIw
  3. 3mTY3Eb
  4. c3CM9H2MWbOAULrtQrThvOMP
Product

tungsten thin film

Crystallite size: 40 - 70 nm

RMS roughness: 5.40 nm

Thickness: 50 nm

Thickness: 770 nm

Medium: none

Support: silicon

Method 4

Type: Physical formation
Source:
Starting materials
  1. pPrhjkYJhEHYJUC5Gs
  2. isQQGL
  3. THhfM6G
  4. Yk6zJhLA38C2XxGisFLaCSp3w
Product

tungsten thin film

Crystallite size: 40 - 70 nm

RMS roughness: 5.53 nm

Thickness: 50 nm

Thickness: 920 nm

Medium: none

Support: silicon

Method 5

Type: Physical formation
Source:
Starting materials
  1. G5FO5gUj56xid3ApTS
  2. 7PCmUw
  3. OtBs0zf
  4. PpWkZkbpmtnNLqaQHufCPfmQ
Product

tungsten thin film

Crystallite size: 5 - 12 nm

RMS roughness: 2.83 nm

Thickness: 50 nm

Thickness: 670 nm

Medium: none

Support: silicon

References

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