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tungsten thin film

Based on

1 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

SiO2/SiNx

Type Complex Compound
Formula
Role layer
2

tungsten

α-W
Type Single Compound
Formula W
Role layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
electrical resistivity

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Characterization

Method Nanomaterial Variant Source
scanning electron microscopy

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Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  1. sBio11FqFoZZ3QsUKV
  2. QEDKBt
  3. 6HUNXZ9
  4. 22lag4ECac3bS0n8AdcIlxkoP
Product

tungsten thin film

Crystallite size: 40 - 70 nm

RMS roughness: 5.53 nm

Thickness: 50 nm

Thickness: 920 nm

Medium: none

Support: silicon

Method 2

Type: Physical formation
Source:
Starting materials
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  2. M5opWs
  3. fhYeucH
  4. UIxk0eO5tuLlm5DvpHbrDR42
Product

tungsten thin film

Crystallite size: 5 - 12 nm

RMS roughness: 2.83 nm

Thickness: 50 nm

Thickness: 670 nm

Medium: none

Support: silicon

Method 3

Type: Physical formation
Source:
Starting materials
  1. sth1deZRNvhXvJK2ng
  2. aXhQ5y
  3. WuCoO2P
  4. IDCeq0RhqOOzEsfLNEnUj0YuT
Product

tungsten thin film

Crystallite size: 40 - 70 nm

RMS roughness: 1.63 nm

Thickness: 230 nm

Thickness: 50 nm

Medium: none

Support: silicon

Method 4

Type: Physical formation
Source:
Starting materials
  1. HCtKgIq8OeK7lMAVAh
  2. LZcAS0
  3. 4jCepeE
  4. bmqgOYZcxRVDeMoZceZD9sSz6
Product

tungsten thin film

Crystallite size: 40 - 70 nm

RMS roughness: 2.11 nm

Thickness: 270 nm

Thickness: 50 nm

Medium: none

Support: silicon

Method 5

Type: Physical formation
Source:
Starting materials
  1. Ogyf0aCkF4fjf0M3UD
  2. imuOLDZivXI4HttEwdt
  3. 3Ue0KC
  4. KhMTkOc
  5. cRIMlou4cwWOkPPy6YU41W2VA
Product

tungsten thin film

Crystallite size: 12 - 40 nm

RMS roughness: 7.82 nm

Thickness: 50 nm

Thickness: 720 nm

Medium: none

Support: silicon

References

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