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tungsten thin film

Based on

1 Articles
2015 Most recent source

Composition

1

SiO2/SiNx

Type Complex Compound
Formula
Role layer
2

tungsten

α-W
Type Single Compound
Formula W
Role layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
electrical resistivity

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Characterization

Method Nanomaterial Variant Source
scanning electron microscopy

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Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  1. 6SJQhkiivgxaqOWVn8
  2. 1OZYcw
  3. ZutLYL8
  4. B0dmdCtCL5carpGP42E8PK0kW
Product

tungsten thin film

Crystallite size: 40 - 70 nm

RMS roughness: 1.63 nm

Thickness: 230 nm

Thickness: 50 nm

Medium: none

Support: silicon

Method 2

Type: Physical formation
Source:
Starting materials
  1. JWUcWfD8b6uIj97lfp
  2. GsGrTeOTU4dbutQ05rcE
  3. xUQ2RV
  4. qWxs9jC
  5. CQeETd5hnhJ4KAdzi4feeIY8R
Product

tungsten thin film

Cavity diameter: ~ 35 nm

Crystallite size: 12 - 40 nm

RMS roughness: 12.21 nm

Thickness: 250 nm

Thickness: 50 nm

Medium: none

Support: silicon

Method 3

Type: Physical formation
Source:
Starting materials
  1. 8AKbNXy1295LR3VNg9
  2. iOku7B
  3. 61eC7Yt
  4. w1bIZvQS2qr0t8GFoUzoDrT8
Product

tungsten thin film

Crystallite size: 40 - 70 nm

RMS roughness: 5.40 nm

Thickness: 50 nm

Thickness: 770 nm

Medium: none

Support: silicon

Method 4

Type: Physical formation
Source:
Starting materials
  1. UFkWbhnp2iY1ZwM3C2
  2. yIg040
  3. 687FeHa
  4. 21UNqwwoRv1y4wPgrImaaqNET
Product

tungsten thin film

Crystallite size: 40 - 70 nm

RMS roughness: 5.53 nm

Thickness: 50 nm

Thickness: 920 nm

Medium: none

Support: silicon

Method 5

Type: Physical formation
Source:
Starting materials
  1. vlA7mp6sMx37EE7gTq
  2. h6uvBw
  3. 8VOQMoB
  4. az7CrMyrq1OgCiTXjeY79wgG
Product

tungsten thin film

Crystallite size: 5 - 12 nm

RMS roughness: 2.83 nm

Thickness: 50 nm

Thickness: 670 nm

Medium: none

Support: silicon

References

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