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SiNx/phosphorus-doped polycrystalline silicon film

Based on

1 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon-rich silicon nitride

Si-reached silicon nitride silicon nitride a-SiNx SRSN
Type Single Compound
Formula SiN(x)
Role layer
2

phosphorus-doped polycrystalline silicon

Type Complex Compound
Formula
Role layer

Applications

Area Application Nanomaterial Variant Source
electronics

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Characterization

Method Nanomaterial Variant Source
transmission electron microscopy

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Preparation

Method 1

Type: Physical formation
Source:
  1. UC
Product

SiNx/phosphorus-doped polycrystalline silicon film

Thickness: 80 nm

Medium: none

Support: soda-lime-silica glass

Method 2

Type: Physical formation
Source:
  1. tc
Product

SiNx/phosphorus-doped polycrystalline silicon film

Thickness: 160 nm

Thickness: 80 nm

Medium: none

Support: soda-lime-silica glass

Method 3

Type: Physical formation
Source:
  1. ns
Product

SiNx/phosphorus-doped polycrystalline silicon film

Thickness: 120 nm

Thickness: 80 nm

Medium: none

Support: soda-lime-silica glass

References

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