Loading ...

SiNx/phosphorus-doped polycrystalline silicon/SiOx film

Based on

1 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon-rich silicon nitride

Si-reached silicon nitride silicon nitride a-SiNx SRSN
Type Single Compound
Formula SiN(x)
Role layer
2

phosphorus-doped polycrystalline silicon

Type Complex Compound
Formula
Role layer
3

silicon-rich silicon oxide

SRSO SiOx
Type Single Compound
Formula SiO(x)
Role layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
charge carrier density

More information/entries available to subscribers only.

Or, view sample content

Applications

Area Application Nanomaterial Variant Source
electronics

More information/entries available to subscribers only.

Or, view sample content

Characterization

Method Nanomaterial Variant Source
optical microscopy

More information/entries available to subscribers only.

Or, view sample content

Preparation

Method 1

Type: Physical formation
Source:
  1. JHQcPHFn
  2. sWB4b
Product

SiNx/phosphorus-doped polycrystalline silicon/SiOx film

Polycrystalline silicon roughness: ~ 2.5 nm

Thickness: 120 nm

Thickness: 150 nm

Thickness: 80 nm

Medium: none

Support: soda-lime-silica glass

Method 2

Type: Physical formation
Source:
  1. HRvOWlvl
  2. mRmgx
Product

SiNx/phosphorus-doped polycrystalline silicon/SiOx film

Thickness: 120 nm

Thickness: 150 nm

Thickness: 80 nm

Medium: none

Support: soda-lime-silica glass

Method 3

Type: Physical formation
Source:
  1. yD2ZSOWr
  2. JmPD7
Product

SiNx/phosphorus-doped polycrystalline silicon/SiOx film

Polycrystalline silicon roughness: 2.62 nm

Thickness: 120 nm

Thickness: 150 nm

Thickness: 80 nm

Medium: none

Support: soda-lime-silica glass

Method 4

Type: Physical formation
Source:
  1. Qzi31mnG
  2. Ilfax
Product

SiNx/phosphorus-doped polycrystalline silicon/SiOx film

Polycrystalline silicon roughness: 1.6 nm

Thickness: 120 nm

Thickness: 150 nm

Thickness: 80 nm

Medium: none

Support: soda-lime-silica glass

Method 5

Type: Physical formation
Source:
  1. PgvszYBH
  2. 5cAox
Product

SiNx/phosphorus-doped polycrystalline silicon/SiOx film

Polycrystalline silicon roughness: 1.6 nm

Thickness: 120 nm

Thickness: 150 nm

Thickness: 80 nm

Medium: none

Support: soda-lime-silica glass

References

Full content is available to subscribers only

To view content please choose from the following:


Sign up for a free trial