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amorphous N-doped ZrO2 layer

Based on

2 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

zirconium(IV) oxide

zirconium dioxide zirconia
Type Single Compound
Formula ZrO2
Role raw materials
2

atomic nitrogen

nitrogen atom
Type Single Compound
Formula N
Role dopant

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
breakdown voltage

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Applications

Area Application Nanomaterial Variant Source
electronics

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Characterization

Method Nanomaterial Variant Source
grazing incidence X-ray and neutron diffraction

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Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  1. F0uGqjpg6DIjMcTuVqgnjRYTDL0WJoTKZQuUPcE
Product

amorphous N-doped ZrO2 layer

Thickness: ~ 6 nm

Medium/Support: none

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • tetrakis(ethylmethylamido) zirconium
  • oxygen
  1. WJKpEYhYf1YqRJJLH
Product

amorphous N-doped ZrO2 layer

Thickness: ~ 6 nm

Medium/Support: none

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • ammonia
  • tetrakis(ethylmethylamido) zirconium
  • oxygen
  1. kyDc0UePo3tECmQTf
Product

amorphous N-doped ZrO2 layer

Thickness: ~ 6 nm

Medium/Support: none

Method 4

Type: Physical formation
Source:
Starting materials
  1. 1cvM6iTGujkjsiAW0ogWh6OaIqZf3YWUHrBBQ5c
Product

amorphous N-doped ZrO2 layer

Thickness: ~ 6 nm

Medium/Support: none

Method 5

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • zirconium(IV) oxide
  1. ix1AU06ofBOOfpbS
Product

amorphous N-doped ZrO2 layer

Thickness: 30 - 35 nm

Medium: none

Support: silicon

References

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