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Si-rich SiNx/SiNx film

Based on

1 Articles
2015 Most recent source

Composition

1

Si2N

Type Single Compound
Formula Si2N
Role layer
2

Si0.8N

Type Single Compound
Formula Si0.8N
Role layer
3

atomic hydrogen

hydrogen atom
Type Single Compound
Formula H
Role dopant

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
charge carrier density dependent on post-deposition annealing

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Applications

Area Application Nanomaterial Variant Source
power generation

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Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • ammonia
  • silicon hydride
  1. KR1dFGGsPGLqrb6eROMe
Product

Si-rich SiNx/SiNx film

Thickness: 10 nm

Thickness: 100 nm

Medium: none

Support: crystalline silicon

References

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