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GeOxNy/HfO2 on Sb-doped Ge

Based on

1 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

GeOxNy

Type Complex Compound
Formula
Role layer
2

hafnium(IV) oxide

hafnium dioxide hafnium oxide hafnia
Type Single Compound
Formula HfO2
Role layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
capacitance dependent on frequency

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Characterization

Method Nanomaterial Variant Source
atomic force microscopy

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Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • surface-oxidized Sb-doped Ge
  1. fwF
  2. oAvzJnvROEU9wtXN
Product

GeOxNy/HfO2 on Sb-doped Ge

Thickness: 7 nm

Medium: none

Support: Sb-doped Ge

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • surface-oxidized Sb-doped Ge
  1. nGv
  2. wRT1TMDJ520v7hnl
Product

GeOxNy/HfO2 on Sb-doped Ge

Thickness: 10 nm

Medium: none

Support: Sb-doped Ge

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • surface-oxidized Sb-doped Ge
  1. Nws
  2. YUZ2JjNVqTjaS38y
Product

GeOxNy/HfO2 on Sb-doped Ge

RMS roughness: 0.29 nm

Thickness: 3 nm

Medium: none

Support: Sb-doped Ge

Method 4

Type: Chemical synthesis
Source:
Starting materials
  • surface-oxidized Sb-doped Ge
  1. ZQY
  2. Suba7bY58EDuAKL7
Product

GeOxNy/HfO2 on Sb-doped Ge

Thickness: 5 nm

Medium: none

Support: Sb-doped Ge

Method 5

Type: Chemical synthesis
Source:
Starting materials
  • surface-oxidized Sb-doped Ge
  1. wdM
  2. 2FVys5wyV4eHTaOB
Product

GeOxNy/HfO2 on Sb-doped Ge

Thickness: 1 nm

Thickness: ~ 0.27 nm

Medium: none

Support: Sb-doped Ge

References

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