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masked nanopillars

Based on

2 Patents
2010 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon

Type Single Compound
Formula Si
Role core
2

aluminium oxide

aluminum oxide alumina
Type Single Compound
Formula Al2O3
Role layer

Applications

Area Application Nanomaterial Variant Source
sensors (excluding biosensors)

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Characterization

Method Nanomaterial Variant Source
scanning electron microscopy

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Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  1. yNbWhNkZpEFMF72cZ3aHFnM8pXovUUj3iB
Product

masked nanopillars

Diameter: 30 - 250 nm

Height: 1700 nm

Outer layer thickness: 25 nm

Medium/Support: none

Method 2

Type: Physical formation
Source:
Starting materials
  • silicon
  1. C7azVZwnJqGjYf4IMK2
Product

masked nanopillars

Diameter: 30 - 250 nm

Height: 1700 nm

Outer layer thickness: 25 nm

Medium/Support: none

Method 3

Type: Physical formation
Source:
Starting materials
  • silicon
  1. MobVV3KrIOTrIuxN3KW
Product

masked nanopillars

Diameter: 30 - 250 nm

Height: 1700 nm

Thickness: 25 nm

Medium/Support: none

Method 4

Type: Chemical synthesis
Source:
Starting materials
  1. oC2wV50KcHbSRHHlQg1cvJvAxVYpjdZddP
Product

masked nanopillars

Diameter: 30 - 250 nm

Height: 1700 nm

Thickness: 25 nm

Medium/Support: none

References

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