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Si wafer with SiNx:H/SiO2 double layer coating

Based on

1 Articles
2013 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon wafer

Si wafer
Type Complex Compound
Formula
Role carriers
2

hydrogen-doped silicon nitride

H-doped SiNx SiNx:H
Type Complex Compound
Formula
Role layer
3

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
optical reflectance

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Characterization

Method Nanomaterial Variant Source
UV-Vis-NIR optical spectroscopy

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Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • boron-doped silicon
  1. lzPG8BT5KP75cD2N3cK5A3Ghu2jZBi0A4M13P5s7DhVUq1h0
  2. mwaWJ
Product

Si wafer with SiNx:H/SiO2 double layer coating

Thickness: 100 nm

Thickness: 50 nm

Medium/Support: none

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • boron-doped silicon
  1. uDe5EcbDYm6g3EzHLOEsSD4js0rxi9q0VQMXmsNCIkn5DQCZ
  2. vrQpV
Product

Si wafer with SiNx:H/SiO2 double layer coating

Thickness: 140 nm

Thickness: 80 nm

Medium/Support: none

References

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